{"resolved":true,"match_type":"uuid","source_type":"original_book","book_id":"07d591c2-0f4c-45ac-a1d7-103c4807db8f","title":"数字经济：内涵与路径","author":null,"edition":null,"publisher":null,"year":null,"isbn":"9787521745023","requested_by":"printed_page","book":{"source_type":"original_book","book_id":"07d591c2-0f4c-45ac-a1d7-103c4807db8f","id":"07d591c2-0f4c-45ac-a1d7-103c4807db8f","uuid":"07d591c2-0f4c-45ac-a1d7-103c4807db8f","title":"数字经济：内涵与路径","normalized_title":"数字经济内涵与路径","author":null,"edition":null,"publisher":null,"year":null,"isbn":"9787521745023","isbns":["9787521745023"],"parsed":true,"ai_readable":true,"document_type":"book","page_count":361,"navigation_url":"https://workshop.closeclaw.top/ai/book/07d591c2-0f4c-45ac-a1d7-103c4807db8f","title_url":"https://workshop.closeclaw.top/ai/title/%E6%95%B0%E5%AD%97%E7%BB%8F%E6%B5%8E%EF%BC%9A%E5%86%85%E6%B6%B5%E4%B8%8E%E8%B7%AF%E5%BE%84","fixed_page_url_template":"https://workshop.closeclaw.top/ai/book/07d591c2-0f4c-45ac-a1d7-103c4807db8f/page/{printed_page}","path_api_url_template":"https://workshop.closeclaw.top/api/ai/book/07d591c2-0f4c-45ac-a1d7-103c4807db8f/page/{printed_page}","read_url":"https://workshop.closeclaw.top/api/ai/read/07d591c2-0f4c-45ac-a1d7-103c4807db8f","page_url":"https://workshop.closeclaw.top/api/ai/books/07d591c2-0f4c-45ac-a1d7-103c4807db8f/page","search_url":"https://workshop.closeclaw.top/api/ai/books/07d591c2-0f4c-45ac-a1d7-103c4807db8f/search"},"page":{"printed_page":77,"pdf_page":76,"physical_index":76,"physical_index_base":0,"printed_page_status":"recognized","page_sha256":"e0c09829532f677ff1c96f28fea726b515c7f1e845bd302aecc0bae335d25897"},"chapter":"第三章","content":"最后，我国在半导体设备领域实现了部分国产化，但最核心的设备仍然差距明显。具体来看，我国半导体去胶设备已实现较高水平的国产化；刻蚀机方面与国际先进的水平差距正不断缩小；清洗设备、薄膜沉积设备、离子注入机等方面实现了少量的国产化；涂胶显影机、CMP（化学机械抛光）设备已研发成功且实现量产供货，打破了外资垄断；但是高端光刻机仍然处于空白。光刻工艺直接决定芯片制程和性能，是芯片制造环节最关键的工艺步骤，而光刻机是核心设备，处于高度垄断状态，其技术含量之高、结构之复杂，被誉为“现代工业皇冠上的明珠”，尤其是最先进的EUV光刻机，仅荷兰的阿斯麦（ASML）能够量产。中国的高端光刻机完全依赖进口，且最先进的EUV光刻机属于被“封锁”状态，自主研发的光刻机虽然取得了一定进展，但在制程上仍然有差距，实现追赶任重而道远。\n\n（二）智能仪器仪表、传感器\n\n检测、显示信息的智能仪器仪表、检测终端是“万物发声”的关键。要在五大性能指标上达到要求：一是灵敏度，二是准确性，三是可靠性，四是能耗，五是安全性。如果没有以传感器和检测芯片为基础的高性能智能仪器仪表、检测终端，智能制造就是空中楼阁。我国在这方面与欧美、日本的差距，比芯片领域的差距还要大。有数据显示，美国的仪器仪表、检测系统的产值只占工业总产值的4%，但却带动美国60%的工业实现了工业自动化。\n\n77","previous_page":76,"next_page":78}